Home › Companies › Axcelis Technologies, Inc. › 2025-2026

Axcelis Technologies, Inc. 2025-2026 Proxy Voting Records

Compiled from SEC Form N-PX filings and Axcelis Technologies, Inc.’s Form 8-K, filed May 6, 2026 (Item 5.07 on EDGAR). Page generated October 14, 2026.

  • 16Reported items
  • 387Asset managers
  • 4,629Fund votes
  • May 5, 2026Main meeting date

Results at a glance

Meeting of May 5, 2026: 8 items on Axcelis Technologies, Inc.’s Form 8-K, filed May 6, 2026: 8 without a stated outcome.

Meeting of February 6, 2026: 2 items on Axcelis Technologies, Inc.’s Form 8-K, filed February 6, 2026: 2 approved.

Material dissent

None.

Material dissent: a director nominee under 80% of the votes cast, say-on-pay under 70%, any other item the board put forward under 80%, or a shareholder proposal with more than 50%, on the company’s own Form 8-K tally. How this is decided

Proxy season: 2023-2024 2024-2025 2025-2026

Explore Axcelis Technologies, Inc. in the interactive database Compare manager voting policies

Official 2025-2026 meeting results reported by Axcelis Technologies, Inc.

These tallies are Axcelis Technologies, Inc.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed May 6, 2026 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX. Axcelis Technologies, Inc. reported 2 meetings in this season; each is tabulated separately below, with its own filing.

Axcelis Technologies, Inc. — official shareholder meeting results, meeting held May 5, 2026 (Form 8-K, filed May 6, 2026)
Ballot itemForAgainst AbstainWithheldBroker non-votesSupport (of votes cast)Reported outcomeVoting standard
Elect Director: Tzu-Yin Chiu 24,713,401---- 580,4472,436,760 98%Not verified—
Elect Director: Gregory Graves 23,996,653---- 1,297,1952,436,760 95%Not verified—
Elect Director: John Kurtzweil 22,672,494---- 2,621,3542,436,760 90%Not verified—
Elect Director: Russell Low 24,880,084---- 413,7642,436,760 98%Not verified—
Elect Director: Jeanne Quirk 22,297,935---- 2,995,9132,436,760 88%Not verified—
Elect Director: Necip Sayiner 24,973,530---- 320,3182,436,760 99%Not verified—
Elect Director: Thomas St. Dennis 22,666,006---- 2,627,8422,436,760 90%Not verified—
Elect Director: Jorge Titinger 24,862,803---- 431,0452,436,760 98%Not verified—

Source: Axcelis Technologies, Inc., Form 8-K, filed with the SEC on May 6, 2026 — read the filing on EDGAR.

Axcelis Technologies, Inc. — official shareholder meeting results, meeting held February 6, 2026 (Form 8-K, filed February 6, 2026)
Ballot itemForAgainst AbstainWithheldBroker non-votesSupport (of votes cast)Reported outcomeVoting standard
1. The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal 24,128,3091,048,20551,598 ---- 96%Approveda majority of the votes cast
2. The Adjournment Proposal Approval of the Adjournment Proposal required the affirmative vote of the holders of a majority of votes cast on the Adjournment Proposal 23,376,9081,796,45454,750 ---- 93%Approveda majority of the votes cast

Source: Axcelis Technologies, Inc., Form 8-K, filed with the SEC on February 6, 2026 — read the filing on EDGAR.

How asset managers voted at the Axcelis Technologies, Inc. 2025-2026 meetings

Each item below shows how the 387 asset managers that disclosed a Axcelis Technologies, Inc. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of Axcelis Technologies, Inc.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. Elect Director: Gregory Graves

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

95% Majority: yes · of votes cast

FOR 95%
FOR: 23,996,653WITHHELD: 1,297,195
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Gregory B. Graves

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Gregory Graves”): 23,996,653 for, 1,297,195 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 95% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,103,774 for, 1,045 withheld, 10 abstained.

FOR
FOR: 14,103,774ABSTAIN: 10WITHHOLD: 1,045
Largest asset managers voting on “Election of Directors: Gregory B. Graves” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9280 100For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

2. Elect Director: Jeanne Quirk

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

88% Majority: yes · of votes cast

FOR 88%
FOR: 22,297,935WITHHELD: 2,995,913
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Jeanne Quirk

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Jeanne Quirk”): 22,297,935 for, 2,995,913 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 88% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 13,322,895 for, 717,651 withheld, 64,284 abstained.

FOR
FOR: 13,322,895ABSTAIN: 64,284WITHHOLD: 717,651
Largest asset managers voting on “Election of Directors: Jeanne Quirk” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,949,1520 145,773For
BlackRock2,170,2600 64,0330For
Fidelity2,091,7170 05,847For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street7,7550 0470,920Withhold
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle00 069,242Withhold
Equitable45,7870 022,491Mixed
TIAA00 067,086Withhold
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

3. Elect Director: John Kurtzweil

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

90% Majority: yes · of votes cast

FOR 90%
FOR: 22,672,494WITHHELD: 2,621,354
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: John T. Kurtzweil

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: John Kurtzweil”): 22,672,494 for, 2,621,354 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 90% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,022,548 for, 74,537 withheld, 7,744 abstained.

FOR
FOR: 14,022,548ABSTAIN: 7,744WITHHOLD: 74,537
Largest asset managers voting on “Election of Directors: John T. Kurtzweil” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9190 190For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6450 030For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA00 067,086Withhold
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

4. Elect Director: Jorge Titinger

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

98% Majority: yes · of votes cast

FOR 98%
FOR: 24,862,803WITHHELD: 431,045
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Jorge Titinger

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Jorge Titinger”): 24,862,803 for, 431,045 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 98% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,091,021 for, 6,080 withheld, 7,728 abstained.

FOR
FOR: 14,091,021ABSTAIN: 7,728WITHHOLD: 6,080
Largest asset managers voting on “Election of Directors: Jorge Titinger” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

5. Elect Director: Necip Sayiner

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

99% Majority: yes · of votes cast

FOR 99%
FOR: 24,973,530WITHHELD: 320,318
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Necip Sayiner, Ph.D.

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Necip Sayiner”): 24,973,530 for, 320,318 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 99% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,103,781 for, 1,045 withheld, 3 abstained.

FOR
FOR: 14,103,781ABSTAIN: 3WITHHOLD: 1,045
Largest asset managers voting on “Election of Directors: Necip Sayiner, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

6. Elect Director: Russell Low

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

98% Majority: yes · of votes cast

FOR 98%
FOR: 24,880,084WITHHELD: 413,764
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Russell J. Low, Ph.D.

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Russell Low”): 24,880,084 for, 413,764 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 98% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,103,764 for, 1,063 withheld, 3 abstained.

FOR
FOR: 14,103,764ABSTAIN: 3WITHHOLD: 1,063
Largest asset managers voting on “Election of Directors: Russell J. Low, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6570 018For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

7. Elect Director: Thomas St. Dennis

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 7 wordings of this item as funds reported it.

90% Majority: yes · of votes cast

FOR 90%
FOR: 22,666,006WITHHELD: 2,627,842
Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Thomas St. Dennis

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Thomas St. Dennis”): 22,666,006 for, 2,627,842 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 90% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 14,017,668 for, 79,417 withheld, 7,744 abstained.

FOR
FOR: 14,017,668ABSTAIN: 7,744WITHHOLD: 79,417
Largest asset managers voting on “Election of Directors: Thomas St. Dennis” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9190 190For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6450 030For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA00 067,086Withhold
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

8. Elect Director: Tzu-Yin Chiu

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Meeting held May 5, 2026.

Combines 6 wordings of this item as funds reported it.

98% Majority: yes · of votes cast

FOR 98%
FOR: 24,713,401WITHHELD: 580,447
Details: description as filed, official tally, votes by 92 asset managers

Description as filed by funds: Election of Directors: Tzu-Yin Chiu, Ph.D.

Axcelis Technologies, Inc.’s own tally for this item (“Elect Director: Tzu-Yin Chiu”): 24,713,401 for, 580,447 withheld, per its Form 8-K filed May 6, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 98% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 92 asset managers below reported 13,302,585 for, 30,794 withheld, 64,045 abstained.

FOR
FOR: 13,302,585ABSTAIN: 64,045WITHHOLD: 30,794
Largest asset managers voting on “Election of Directors: Tzu-Yin Chiu, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,941,1880 50For
BlackRock2,170,2600 64,0330For
Fidelity2,091,7170 05,847For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For
QUANTITATIVE MASTER SERIES LLC51,3720 00For
RBB FUND, INC.46,1860 00For

Showing the 25 largest of 92 asset managers. See all 92 in the interactive database.

9. To approve the issuance of shares of Axcelis Technologies, Inc. ("Axcelis") common stock (the "Axcelis Share Issuance…

No official matchEXTRAORDINARY TRANSACTIONS

Meeting held February 6, 2026.

Combines 2 wordings of this item as funds reported it.

99% of fund votes cast · no official result

FOR
Details: description as filed, votes by 94 asset managers

Description as filed by funds: To approve the issuance of shares of Axcelis Technologies, Inc. ("Axcelis") common stock (the "Axcelis Share Issuance Proposal") pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, and Veeco Instruments Inc.

The 94 asset managers below reported 13,133,256 for, 198,472 against, 22,214 abstained. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 13,133,256AGAINST: 198,472ABSTAIN: 22,214
Largest asset managers voting on “To approve the issuance of shares of Axcelis Technologies, Inc. ("Axcelis") common stock (the "Axcelis Share I” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,931,6833 00For
BlackRock2,168,0310 00For
Fidelity1,455,7340 00For
American Century815,0760 00For
PRIMECAP Odyssey Funds621,9860 00For
State Street457,8480 00For
Invesco411,1960 00For
Dimensional301,3970 00For
T. Rowe Price286,0450 00For
Managed Portfolio Series277,8450 00For
Jackson National244,0980 00For
GMO197,2720 00For
Allspring192,7290 00For
Bridge Builder Trust171,6850 00For
BOSTON TRUST WALDEN FUNDS0160,730 00Against
FIRST EAGLE FUNDS119,4120 00For
Victory Capital104,0880 00For
First Trust87,4000 00For
Brighthouse85,1800 00For
Goldman Sachs80,6890 00For
Royce75,5530 00For
Columbia Threadneedle75,5190 00For
Northern Trust73,8790 00For
Equitable45,7870 22,2140Mixed
TIAA66,6180 00For

Showing the 25 largest of 94 asset managers. See all 94 in the interactive database.

10. To approve the issuance of shares of Axcelis Technologies, Inc.'s ("Axcelis") common stock (the "Axcelis Share Issuance…

No official matchEXTRAORDINARY TRANSACTIONS

Meeting held February 6, 2026.

Combines 2 wordings of this item as funds reported it.

100% of fund votes cast · no official result

FOR
Details: description as filed, votes by 13 asset managers

Description as filed by funds: To approve the issuance of shares of Axcelis Technologies, Inc.'s ("Axcelis") common stock (the "Axcelis Share Issuance Proposal") pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, and Veeco Instruments Inc.

The 13 asset managers below reported 692,762 for. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 692,762
Largest asset managers voting on “To approve the issuance of shares of Axcelis Technologies, Inc.'s ("Axcelis") common stock (the "Axcelis Share” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Charles Schwab387,5830 00For
Federated Hermes200,4460 00For
SEI26,3200 00For
PACE SELECT ADVISORS TRUST14,8380 00For
Global X14,3470 00For
Prudential/PGIM11,5500 00For
TARGET PORTFOLIO TRUST10,7000 00For
Morningstar Funds Trust10,0270 00For
SEI Exchange Traded Funds6,5770 00For
Vanguard6,0970 00For
Venerable Variable Insurance Trust2,4580 00For
NEW COVENANT FUNDS9510 00For
Nationwide8680 00For

11. 1. The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of…

Official resultEXTRAORDINARY TRANSACTIONSReported outcome: Approved

Meeting held February 6, 2026.

96% Approved · of votes cast

FOR 96%
FOR: 24,128,309AGAINST: 1,048,205
Details: description as filed, official tally, votes by 3 asset managers

Description as filed by funds: Issue Shares in Connection with Merger

Axcelis Technologies, Inc.’s own tally for this item (“1. The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal”): 24,128,309 for, 1,048,205 against — passed, per its Form 8-K filed February 6, 2026 (Item 5.07).

Reported outcome: Approved, in the filing’s own words: “Proposal 1: The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal”
Support: 96% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.
Voting standard, as the filing states it: a majority of the votes cast (“majority of votes cast”).

The 3 asset managers below reported 46,868 for.

FOR
FOR: 46,868
Largest asset managers voting on “Issue Shares in Connection with Merger” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower23,1650 00For
JPMorgan20,0300 00For
CLEARWATER INVESTMENT TRUST3,6730 00For

12. TO APPROVE THE ISSUANCE OF SHARES OF AXCELIS TECHNOLOGIES, INC. (AXCELIS") COMMON STOCK (THE &QUOTAXCELIS SHARE…

No official matchEXTRAORDINARY TRANSACTIONS

Meeting held February 6, 2026.

100% of fund votes cast · no official result

FOR
Details: description as filed, votes by 3 asset managers

Description as filed by funds: TO APPROVE THE ISSUANCE OF SHARES OF AXCELIS TECHNOLOGIES, INC. (AXCELIS") COMMON STOCK (THE &QUOTAXCELIS SHARE ISSUANCE PROPOSAL") PURSUANT TO THE AGREEMENT AND PLAN OF MERGER, DATED AS OF SEPTEMBER 30, 2025, BY AND AMONG AXCELIS, VICTORY MERGER SUB, INC., A WHOLLY OWNED SUBSIDIARY OF AXCELIS, AND VEECO INSTRUMENTS INC. "

The 3 asset managers below reported 5,442 for. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 5,442
Largest asset managers voting on “TO APPROVE THE ISSUANCE OF SHARES OF AXCELIS TECHNOLOGIES, INC. (AXCELIS") COMMON STOCK (THE &QUOTAXCELIS SHAR” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
TIMOTHY PLAN4,9980 00For
RBB Fund Trust2890 00For
Advisors' Inner Circle Fund III1550 00For

13. To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies if there…

No official matchCORPORATE GOVERNANCE

Meeting held February 6, 2026.

94% of fund votes cast · no official result

FOR
Details: description as filed, votes by 105 asset managers

Description as filed by funds: To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies if there are insufficient votes to adopt the Axcelis Share Issuance Proposal.

The 105 asset managers below reported 13,197,450 for, 829,070 against, 22,214 abstained. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 13,197,450AGAINST: 829,070ABSTAIN: 22,214
Largest asset managers voting on “To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies ” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,937,7784 00For
BlackRock2,168,0310 00For
Fidelity1,455,7340 00For
American Century815,0760 00For
PRIMECAP Odyssey Funds621,9860 00For
State Street8,331449,517 00Against
Invesco411,1960 00For
Charles Schwab387,5830 00For
Dimensional301,3970 00For
T. Rowe Price0286,045 00Against
Managed Portfolio Series277,8450 00For
Jackson National244,0980 00For
Federated Hermes200,4460 00For
GMO197,2720 00For
Allspring192,7290 00For
Bridge Builder Trust171,6850 00For
BOSTON TRUST WALDEN FUNDS160,7300 00For
FIRST EAGLE FUNDS119,4120 00For
Victory Capital104,0880 00For
First Trust87,4000 00For
Brighthouse48,56336,617 00Mixed
Goldman Sachs80,6890 00For
Royce75,5530 00For
Columbia Threadneedle75,5190 00For
Northern Trust73,8790 00For

Showing the 25 largest of 105 asset managers. See all 105 in the interactive database.

14. Adjourn Meeting

No official matchEXTRAORDINARY TRANSACTIONS

Meeting held February 6, 2026.

100% of fund votes cast · no official result

FOR
Details: votes by 3 asset managers

The 3 asset managers below reported 46,868 for. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 46,868
Largest asset managers voting on “Adjourn Meeting” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower23,1650 00For
JPMorgan20,0300 00For
CLEARWATER INVESTMENT TRUST3,6730 00For

15. Say on Pay - An advisory vote on the approval of executive compensation.

No official matchFund totals may overlapSECTION 14A SAY-ON-PAY VOTES

Meeting held May 5, 2026.

Combines 4 wordings of this item as funds reported it.

93% Fund and manager reports combined; may count the same shares twice · no official result

FOR
Details: votes by 376 asset managers

Fund voting reports and institutional-manager reports both cover this item. An institutional manager can report shares that a fund it advises also reports, so the two are shown separately below and never added together, and their sum is not shown (fund and manager reports combined may count the same shares twice). The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

Fund voting reports: 100 asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,91918 00For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
RBB FUND, INC.135,6300 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For

Fund voting reports, all 100 managers: 14,163,910 for, 18 against, 1,645 abstained. Showing the 25 largest; see all in the interactive database.

Institutional-manager reports: 302 asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Fidelity1,280,2320 00For
American Century1,092,8880 00For
REINHART PARTNERS, LLC.1,009,5970 00For
GEODE CAPITAL MANAGEMENT, LLC959,4980 00For
Amundi0916,831 00Against
BNP Paribas Asset Management Holding S.A.0871,870 00Against
BlackRock766,793285 00For
PRIMECAP MANAGEMENT CO/CA/662,3520 00For
State Street620,1130 00For
John Hancock503,6330 00For
Grantham, Mayo, Van Otterloo & Co. LLC451,5590 00For
Charles Schwab448,3720 00For
T. Rowe Price333,0700 00For
Federated Hermes262,1880 00For
Vanguard254,4650 00For
Boston Partners248,4990 00For
Northern Trust248,3590 00For
Allspring216,3770 00For
PRINCIPAL GLOBAL INVESTORS213,3250 00For
BOSTON TRUST WALDEN NATIONAL ASSOCIATION180,8470 00For
PARAMETRIC PORTFOLIO ASSOCIATES LLC166,9350 00For
KENNEDY CAPITAL MANAGEMENT LLC139,8860 00For
SEGALL BRYANT & HAMILL, LLC127,5820 00For
MELLON INVESTMENTS Corp122,5540 00For
Portolan Capital Management, LLC111,6890 00For

Institutional-manager reports, all 302 managers: 12,639,739 for, 1,986,177 against, 66 abstained, 888 not voted. Showing the 25 largest; see all in the interactive database.

16. PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.

No official matchAUDIT-RELATED

Meeting held May 5, 2026.

Combines 2 wordings of this item as funds reported it.

99.8% of fund votes cast · no official result

FOR
Details: votes by 102 asset managers

The 102 asset managers below reported 14,053,118 for, 25,373 against, 1,045 abstained. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 14,053,118AGAINST: 25,373ABSTAIN: 1,045
Largest asset managers voting on “PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,949,1475,791 00For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,64530 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

Largest Axcelis Technologies, Inc. shareholders voting in 2025-2026

Ranked separately for each type of Form N-PX report. An institutional manager can report shares that a fund it advises also reports, so the two tables can list the same shares and are never added together. Each is ranked by the shares voted on the item that the most managers of that type reported, shown as a share of the 30,733,897 shares outstanding at the time of that meeting.

Fund voting reports: top Axcelis Technologies, Inc. shareholders by shares voted on “To approve the adjournment of the special meeting, if necessary or appropriate, to solicit…”, 2025-2026
#Asset manager % of shares outstanding
1Vanguard 12.81%
2BlackRock 7.05%
3Fidelity 4.74%
4American Century 2.65%
5PRIMECAP Odyssey Funds 2.02%
6State Street 1.49%
7Invesco 1.34%
8Charles Schwab 1.26%
9Dimensional 0.98%
10T. Rowe Price 0.93%
Institutional-manager reports: top Axcelis Technologies, Inc. shareholders by shares voted on “Say on Pay - An advisory vote on the approval of executive compensation.”, 2025-2026
#Asset manager % of shares outstanding
1Fidelity 4.17%
2American Century 3.56%
3REINHART PARTNERS, LLC. 3.28%
4GEODE CAPITAL MANAGEMENT, LLC 3.12%
5Amundi 2.98%
6BNP Paribas Asset Management Holding S.A. 2.84%
7BlackRock 2.50%
8PRIMECAP MANAGEMENT CO/CA/ 2.16%
9State Street 2.02%
10John Hancock 1.64%

Reported Axcelis Technologies, Inc. holdings and ownership

As disclosed to the SEC in Form 13F (quarter-end holdings of 30 large managers), Schedules 13D and 13G (beneficial ownership above 5%) and the company’s own proxy statement (DEF 14A). Each row names its form.

Axcelis Technologies, Inc. holdings and ownership disclosed for the 2025-2026 proxy season
Holder % outstanding Disclosure
BlackRock 16.06% 13F
Vanguard Group 13.41% 13F
Vanguard Portfolio Management 8.14% 13G
FMR (Fidelity) 7.91% 13F
State Street 3.87% 13F
REINHART PARTNERS, LLC. 3.02% 13G
Dimensional Fund Advisors 2.75% 13F
D.E. Shaw 1.77% 13F
Goldman Sachs 1.62% 13F
Charles Schwab 1.45% 13F

Percentages above are of 30,733,897 shares outstanding, as reported by Axcelis Technologies, Inc. on its Form 10-Q dated May 5, 2026 (see the filing on EDGAR). This is the count contemporaneous with the 2025-2026 meeting, not today’s. Each holding is as of its own filing, which may be dated before or after the meeting.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered funds disclose how they voted every proxy and institutional managers disclose their votes on executive pay (say-on-pay, say-on-frequency and golden parachutes), and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from Axcelis Technologies, Inc.’s 10-Q dated May 5, 2026. This page is a static snapshot rebuilt weekly on October 14, 2026; a live search always shows the current data.

At Axcelis Technologies, Inc.'s 2 shareholder meetings in the 2025-2026 proxy season (held February 6, 2026 and May 5, 2026), 387 asset managers reported how they voted in their SEC Form N-PX filings, covering 4,629 separate fund positions. Their filings are grouped here into 16 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. Axcelis Technologies, Inc.'s own Form 8-K tally for this meeting is published below, but no row in it could be matched to the most widely held item, so this page states no certified outcome for that item. On that item — Say on Pay - An advisory vote on the approval of executive compensation. — the reporting funds and managers cast 93% of the shares they voted in favour (FOR divided by FOR plus AGAINST plus WITHHELD; abstained and unvoted shares are excluded because neither took a side). Fund and manager reports are combined in it and may count the same shares twice: it adds fund reports to institutional-manager reports, which can cover the same shares. It is not the company's certified result.

Axcelis Technologies, Inc. proxy season coverage: 2023-2024 · 2024-2025 · 2025-2026 (this page).

Download data (CSV): ballot items · votes by manager · column guide.