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AXCELIS TECHNOLOGIES INC. 2024-2025 Proxy Voting Records

Compiled from SEC Form N-PX filings and AXCELIS TECHNOLOGIES INC.’s Form 8-K, filed May 8, 2025 (Item 5.07 on EDGAR). Page generated October 18, 2026.

12Reported items
347Asset managers
3,944Fund votes
May 7, 2025Meeting date

Results at a glance

Meeting of May 7, 2025: 8 items on AXCELIS TECHNOLOGIES INC.’s Form 8-K, filed May 8, 2025: 8 without a stated outcome.

Material dissent

None.

Material dissent: a director nominee under 80% of the votes cast, say-on-pay under 70%, any other item the board put forward under 80%, or a shareholder proposal with more than 50%, on the company’s own Form 8-K tally. How this is decided

Proxy season: 2023-2024 2024-2025 2025-2026

Explore AXCELIS TECHNOLOGIES INC. in the interactive database Compare manager voting policies

Official 2024-2025 meeting results reported by AXCELIS TECHNOLOGIES INC.

These tallies are AXCELIS TECHNOLOGIES INC.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed May 8, 2025 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX.

AXCELIS TECHNOLOGIES INC. — official shareholder meeting results, meeting held May 7, 2025
Ballot item	For	Against	Abstain	Withheld	Broker non-votes	Support (of votes cast)	Reported outcome	Voting standard
Elect Director: Tzu-Yin Chiu	23,767,915	--	--	1,868,681	3,149,557	93%	Not verified	—
Elect Director: Gregory B. Graves	24,352,706	--	--	1,283,426	3,150,021	95%	Not verified	—
Elect Director: John T. Kurtzweil	23,263,802	--	--	2,372,794	3,149,557	91%	Not verified	—
Elect Director: Russell J. Low	24,349,574	--	--	1,286,558	3,150,021	95%	Not verified	—
Elect Director: Jeanne Quirk	22,913,990	--	--	2,722,606	3,149,557	89%	Not verified	—
Elect Director: Necip Sayiner	24,405,484	--	--	1,230,648	3,150,021	95%	Not verified	—
Elect Director: Thomas St. Dennis	23,268,728	--	--	2,367,868	3,149,557	91%	Not verified	—
Elect Director: Jorge Titinger	23,727,873	--	--	1,908,259	3,150,021	93%	Not verified	—

Source: AXCELIS TECHNOLOGIES INC., Form 8-K, filed with the SEC on May 8, 2025 — read the filing on EDGAR.

How asset managers voted at the AXCELIS TECHNOLOGIES INC. 2024-2025 meeting

Each item below shows how the 347 asset managers that disclosed a AXCELIS TECHNOLOGIES INC. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of AXCELIS TECHNOLOGIES INC.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. Elect Director: Tzu-Yin Chiu

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

93% Majority: yes · of votes cast

FOR 93%

FOR: 23,767,915WITHHELD: 1,868,681

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Tzu-Yin Chiu, Ph.D.

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Tzu-Yin Chiu”): 23,767,915 for, 1,868,681 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 93% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 16,375,084 for, 190,385 withheld, 115,233 abstained.

FOR

FOR: 16,375,084ABSTAIN: 115,233WITHHOLD: 190,385

Largest asset managers voting on “Election of Directors: Tzu-Yin Chiu, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Withheld	Vote
Vanguard	4,387,284	4	0	For
BlackRock	2,951,841	21,973	0	For
American Century	1,746,590	0	0	For
Fidelity	970,185	0	10,217	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,340	0	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
PARADIGM FUNDS	98,000	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	0	0	87,494	Withhold
BUFFALO FUNDS	0	79,940	0	Abstain
Columbia Threadneedle	69,855	0	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

2. Elect Director: Gregory B. Graves

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

95% Majority: yes · of votes cast

FOR 95%

FOR: 24,352,706WITHHELD: 1,283,426

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Gregory B. Graves

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Gregory B. Graves”): 24,352,706 for, 1,283,426 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 95% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 16,583,895 for, 7,001 withheld, 89,806 abstained.

FOR

FOR: 16,583,895ABSTAIN: 89,806WITHHOLD: 7,001

Largest asset managers voting on “Election of Directors: Gregory B. Graves” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
PARADIGM FUNDS	98,000	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

3. Elect Director: John T. Kurtzweil

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

91% Majority: yes · of votes cast

FOR 91%

FOR: 23,263,802WITHHELD: 2,372,794

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: John T. Kurtzweil

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: John T. Kurtzweil”): 23,263,802 for, 2,372,794 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 91% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 16,407,595 for, 148,009 withheld, 125,098 abstained.

FOR

FOR: 16,407,595ABSTAIN: 125,098WITHHOLD: 148,009

Largest asset managers voting on “Election of Directors: John T. Kurtzweil” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Withheld	Vote
Vanguard	4,387,283	5	0	For
BlackRock	2,951,841	21,973	0	For
American Century	1,746,590	0	0	For
Fidelity	970,185	0	10,217	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,340	0	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
PARADIGM FUNDS	98,000	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	0	0	87,494	Withhold
BUFFALO FUNDS	0	79,940	0	Abstain
Columbia Threadneedle	69,855	0	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

4. Elect Director: Russell J. Low

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

95% Majority: yes · of votes cast

FOR 95%

FOR: 24,349,574WITHHELD: 1,286,558

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Russell J. Low, Ph.D.

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Russell J. Low”): 24,349,574 for, 1,286,558 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 102 asset managers below reported 16,594,771 for, 5,989 withheld, 79,942 abstained.

FOR

FOR: 16,594,771ABSTAIN: 79,942WITHHOLD: 5,989

Largest asset managers voting on “Election of Directors: Russell J. Low, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
PARADIGM FUNDS	98,000	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

5. Elect Director: Jeanne Quirk

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

89% Majority: yes · of votes cast

FOR 89%

FOR: 22,913,990WITHHELD: 2,722,606

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Jeanne Quirk

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Jeanne Quirk”): 22,913,990 for, 2,722,606 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 89% of votes cast — FOR ÷ (FOR + WITHHELD); abstentions and broker non-votes are excluded.

The 102 asset managers below reported 15,532,108 for, 1,033,360 withheld, 115,234 abstained.

FOR

FOR: 15,532,108ABSTAIN: 115,234WITHHOLD: 1,033,360

Largest asset managers voting on “Election of Directors: Jeanne Quirk” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Withheld	Vote
Vanguard	4,387,283	5	0	For
BlackRock	2,951,841	21,973	0	For
American Century	1,746,590	0	0	For
Fidelity	970,185	0	10,217	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	6,953	0	463,387	Withhold
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	0	0	327,563	Withhold
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
PARADIGM FUNDS	98,000	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	0	0	87,494	Withhold
BUFFALO FUNDS	0	79,940	0	Abstain
Columbia Threadneedle	0	0	69,855	Withhold

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

6. Elect Director: Necip Sayiner

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

95% Majority: yes · of votes cast

FOR 95%

FOR: 24,405,484WITHHELD: 1,230,648

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Necip Sayiner, Ph.D.

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Necip Sayiner”): 24,405,484 for, 1,230,648 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 102 asset managers below reported 16,584,771 for, 6,125 withheld, 89,806 abstained.

FOR

FOR: 16,584,771ABSTAIN: 89,806WITHHOLD: 6,125

Largest asset managers voting on “Election of Directors: Necip Sayiner, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
PARADIGM FUNDS	98,000	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

7. Elect Director: Thomas St. Dennis

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

91% Majority: yes · of votes cast

FOR 91%

FOR: 23,268,728WITHHELD: 2,367,868

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Thomas St. Dennis

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Thomas St. Dennis”): 23,268,728 for, 2,367,868 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 102 asset managers below reported 16,402,855 for, 152,749 withheld, 125,098 abstained.

FOR

FOR: 16,402,855ABSTAIN: 125,098WITHHOLD: 152,749

Largest asset managers voting on “Election of Directors: Thomas St. Dennis” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Withheld	Vote
Vanguard	4,387,283	5	0	For
BlackRock	2,951,841	21,973	0	For
American Century	1,746,590	0	0	For
Fidelity	970,185	0	10,217	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,340	0	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
PARADIGM FUNDS	98,000	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	0	0	87,494	Withhold
BUFFALO FUNDS	0	79,940	0	Abstain
Columbia Threadneedle	69,855	0	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

8. Elect Director: Jorge Titinger

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 8 wordings of this item as funds reported it.

93% Majority: yes · of votes cast

FOR 93%

FOR: 23,727,873WITHHELD: 1,908,259

Details: description as filed, official tally, votes by 102 asset managers

Description as filed by funds: Election of Directors: Jorge Titinger

AXCELIS TECHNOLOGIES INC.’s own tally for this item (“Elect Director: Jorge Titinger”): 23,727,873 for, 1,908,259 withheld, per its Form 8-K filed May 8, 2025 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 102 asset managers below reported 16,511,988 for, 62,847 withheld, 105,867 abstained.

FOR

FOR: 16,511,988ABSTAIN: 105,867WITHHOLD: 62,847

Largest asset managers voting on “Election of Directors: Jorge Titinger” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,284	4	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	95,445	16,059	Mixed
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
PARADIGM FUNDS	98,000	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

9. Proposal to amend the 2012 Equity Incentive Plan to increase the number of shares reserve for issuance

No official matchCOMPENSATION

82% of fund votes cast · no official result

FORAGAINST

Details: votes by 62 asset managers

The 62 asset managers below reported 8,603,732 for, 1,890,526 against. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 8,603,732AGAINST: 1,890,526

Largest asset managers voting on “Proposal to amend the 2012 Equity Incentive Plan to increase the number of shares reserve for issuance” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Vote
Vanguard	4,384,763	0	For
American Century	0	1,746,590	Against
Fidelity	980,402	0	For
State Street	470,321	19	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Against
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	0	For
Janus Detroit Street Trust	55,215	0	For
MFS	50,826	0	For
Managed Portfolio Series	49,724	0	For
Voya	42,652	0	For
Lincoln Financial	40,826	0	For
Nuveen	0	39,857	Against
BNY Mellon	38,343	0	For
RBB FUND, INC.	37,736	0	For
HOMESTEAD FUNDS INC	34,200	0	For
Principal	33,312	0	For

Showing the 25 largest of 62 asset managers. See all 62 in the interactive database.

10. PROPOSAL TO AMEND THE 2012 EQUITY INCENTIVE PLAN TO INCREASE THE NUMBER OF SHARES RESERVED FOR ISSUANCE.

No official matchCOMPENSATION

98% of fund votes cast · no official result

FOR

Details: votes by 45 asset managers

The 45 asset managers below reported 5,861,946 for, 105,543 against, 85,929 abstained. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 5,861,946AGAINST: 105,543ABSTAIN: 85,929

Largest asset managers voting on “PROPOSAL TO AMEND THE 2012 EQUITY INCENTIVE PLAN TO INCREASE THE NUMBER OF SHARES RESERVED FOR ISSUANCE.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Vote
BlackRock	2,973,814	0	0	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
Charles Schwab	327,563	0	0	For
Managed Portfolio Series	317,845	0	0	For
Jackson National	285,346	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	22,387	89,117	0	Mixed
Harbor Funds II	94,048	0	0	For
BUFFALO FUNDS	0	0	79,940	Abstain
QUANTITATIVE MASTER SERIES LLC	45,825	0	0	For
JPMorgan	40,910	0	0	For
Global X	19,130	0	0	For
Advisor Managed Portfolios	17,883	0	0	For
SEI	14,308	0	0	For
MASTER INVESTMENT PORTFOLIO	13,316	0	0	For
Allianz	11,650	0	0	For
John Hancock	11,610	0	0	For
ETF Series Solutions	0	9,666	0	Against
Harbor ETF Trust	9,161	0	0	For
NORTHERN LIGHTS FUND TRUST II	7,792	0	0	For
Prudential/PGIM	7,100	0	0	For
Gabelli	0	6,422	0	Against
Brighthouse	0	0	5,989	Abstain
Russell Investments	4,470	0	0	For

Showing the 25 largest of 45 asset managers. See all 45 in the interactive database.

11. Say on Pay - An advisory vote on the approval of executive compensation.

No official match Fund totals may overlapSECTION 14A SAY-ON-PAY VOTES

Combines 5 wordings of this item as funds reported it.

84% Fund and manager reports combined; may count the same shares twice · no official result

FORAGAINST

Details: votes by 344 asset managers

Fund voting reports and institutional-manager reports both cover this item. An institutional manager can report shares that a fund it advises also reports, so the two are shown separately below and never added together, and their sum is not shown (fund and manager reports combined may count the same shares twice). The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

Fund voting reports: 100 asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Vote
Vanguard	4,386,259	1,029	0	For
BlackRock	2,973,814	0	0	For
American Century	0	1,746,590	0	Against
Fidelity	980,402	0	0	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,340	0	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	6,328	105,176	0	Mixed
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	87,494	0	0	For
BUFFALO FUNDS	0	0	79,940	Abstain
Columbia Threadneedle	69,855	0	0	For
Brighthouse	59,837	0	5,989	Mixed

Fund voting reports, all 100 managers: 14,533,158 for, 1,927,673 against, 85,929 abstained. Showing the 25 largest; see all in the interactive database.

Institutional-manager reports: 273 asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Vote
American Century	0	1,249,339	Against
State Street	1,115,076	0	For
BlackRock	990,900	285	For
REINHART PARTNERS, LLC.	906,774	73,058	Mixed
GEODE CAPITAL MANAGEMENT, LLC	918,571	0	For
PRIMECAP MANAGEMENT CO/CA/	895,296	0	For
BNP Paribas Asset Management Holding S.A.	0	787,054	Against
T. Rowe Price	532,363	0	For
Amundi	0	472,521	Against
Boston Trust Walden Co	407,138	0	For
Northern Trust	359,391	0	For
Charles Schwab	351,549	0	For
Grantham, Mayo, Van Otterloo & Co. LLC	337,518	0	For
Boston Partners	271,953	0	For
MELLON INVESTMENTS Corp	217,936	0	For
PRINCIPAL GLOBAL INVESTORS	198,347	0	For
Federated Hermes	167,672	0	For
Jackson Square Partners, LLC	150,060	0	For
PARAMETRIC PORTFOLIO ASSOCIATES LLC	137,528	0	For
M&G Plc	131,664	0	For
Nuveen	128,579	0	For
Vanguard	128,050	0	For
KENNEDY CAPITAL MANAGEMENT LLC	113,110	0	For
Invesco	92,714	0	For
Dimensional	73,819	0	For

Institutional-manager reports, all 273 managers: 9,904,668 for, 2,799,986 against, 1,461 not voted. Showing the 25 largest; see all in the interactive database.

12. PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.

No official matchAUDIT-RELATED

99.8% of fund votes cast · no official result

FOR

Details: votes by 100 asset managers

The 100 asset managers below reported 16,436,042 for, 24,789 against, 85,929 abstained. The figure above is FOR ÷ (FOR + AGAINST + WITHHELD) of the shares these managers voted; abstained and unvoted shares are in neither half, and these managers are a subset of all shareholders, not the meeting result.

FOR: 16,436,042AGAINST: 24,789ABSTAIN: 85,929

Largest asset managers voting on “PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Vote
Vanguard	4,386,260	1,028	0	For
BlackRock	2,973,814	0	0	For
American Century	1,746,590	0	0	For
Fidelity	980,402	0	0	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,321	19	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	87,494	0	0	For
BUFFALO FUNDS	0	0	79,940	Abstain
Columbia Threadneedle	69,855	0	0	For
Brighthouse	59,837	0	5,989	Mixed

Showing the 25 largest of 100 asset managers. See all 100 in the interactive database.

Largest AXCELIS TECHNOLOGIES INC. shareholders voting in 2024-2025

Ranked separately for each type of Form N-PX report. An institutional manager can report shares that a fund it advises also reports, so the two tables can list the same shares and are never added together. Each is ranked by the shares voted on the item that the most managers of that type reported, shown as a share of the 32,129,000 shares outstanding at the time of that meeting.

Fund voting reports: top AXCELIS TECHNOLOGIES INC. shareholders by shares voted on “Election of Directors: Tzu-Yin Chiu, Ph.D.”, 2024-2025
#	Asset manager	% of shares outstanding
1	Vanguard	13.66%
2	BlackRock	9.26%
3	American Century	5.44%
4	Fidelity	3.05%
5	PRIMECAP Odyssey Funds	2.61%
6	Pacer Funds Trust	1.91%
7	State Street	1.46%
8	Dimensional	1.40%
9	T. Rowe Price	1.25%
10	Managed Portfolio Series	1.14%

Institutional-manager reports: top AXCELIS TECHNOLOGIES INC. shareholders by shares voted on “Say on Pay - An advisory vote on the approval of executive compensation.”, 2024-2025
#	Asset manager	% of shares outstanding
1	American Century	3.89%
2	State Street	3.47%
3	BlackRock	3.09%
4	REINHART PARTNERS, LLC.	3.05%
5	GEODE CAPITAL MANAGEMENT, LLC	2.86%
6	PRIMECAP MANAGEMENT CO/CA/	2.79%
7	BNP Paribas Asset Management Holding S.A.	2.45%
8	T. Rowe Price	1.66%
9	Amundi	1.47%
10	Boston Trust Walden Co	1.27%

Reported AXCELIS TECHNOLOGIES INC. holdings and ownership

As disclosed to the SEC in Form 13F (quarter-end holdings of 30 large managers), Schedules 13D and 13G (beneficial ownership above 5%) and the company’s own proxy statement (DEF 14A). Each row names its form.

AXCELIS TECHNOLOGIES INC. holdings and ownership disclosed for the 2024-2025 proxy season
Holder	% outstanding	Disclosure
BlackRock	16.62%	13F
Vanguard Group	13.82%	13F
FMR LLC	10.83%	13G
Vanguard Portfolio Management	7.79%	13G
REINHART PARTNERS, LLC.	4.95%	13G
American Century Investment Management, Inc.	4.19%	13G
State Street	3.89%	13F
Dimensional Fund Advisors	2.18%	13F
Goldman Sachs	1.98%	13F
T. Rowe Price	1.64%	13F

Percentages above are of 32,129,000 shares outstanding, as reported by AXCELIS TECHNOLOGIES INC. on its Form 10-Q dated March 31, 2025 (see the filing on EDGAR). This is the count contemporaneous with the 2024-2025 meeting, not today’s. Each holding is as of its own filing, which may be dated before or after the meeting.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered funds disclose how they voted every proxy and institutional managers disclose their votes on executive pay (say-on-pay, say-on-frequency and golden parachutes), and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from AXCELIS TECHNOLOGIES INC.’s 10-Q dated March 31, 2025. This page is a static snapshot rebuilt weekly on October 18, 2026; a live search always shows the current data.

At AXCELIS TECHNOLOGIES INC.'s shareholder meeting held May 7, 2025, in the 2024-2025 proxy season, 347 asset managers reported how they voted in their SEC Form N-PX filings, covering 3,944 separate fund positions. Their filings are grouped here into 12 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. AXCELIS TECHNOLOGIES INC.'s own Form 8-K tally for this meeting is published below, but no row in it could be matched to the most widely held item, so this page states no certified outcome for that item. On that item — Say on Pay - An advisory vote on the approval of executive compensation. — the reporting funds and managers cast 84% of the shares they voted in favour (FOR divided by FOR plus AGAINST plus WITHHELD; abstained and unvoted shares are excluded because neither took a side). Fund and manager reports are combined in it and may count the same shares twice: it adds fund reports to institutional-manager reports, which can cover the same shares. It is not the company's certified result.

AXCELIS TECHNOLOGIES INC. proxy season coverage: 2023-2024 · 2024-2025 (this page) · 2025-2026.

Download data (CSV): ballot items · votes by manager · column guide.