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Onto Innovation Inc. 2025-2026 Proxy Voting Records

Compiled from SEC Form N-PX filings and Onto Innovation Inc.’s Form 8-K, filed May 20, 2026 (Item 5.07 on EDGAR). Page generated October 18, 2026.

9Ballot items
536Asset managers
6,080Fund votes
May 20, 2026Meeting date

Results at a glance

Meeting of May 20, 2026: 9 items on Onto Innovation Inc.’s Form 8-K, filed May 20, 2026: 2 approved · 7 without a stated outcome.

Material dissent

None.

Material dissent: a director nominee under 80% of the votes cast, say-on-pay under 70%, any other item the board put forward under 80%, or a shareholder proposal with more than 50%, on the company’s own Form 8-K tally. How this is decided

Proxy season: 2023-2024 2024-2025 2025-2026

Explore Onto Innovation Inc. in the interactive database Compare manager voting policies

Official 2025-2026 meeting results reported by Onto Innovation Inc.

These tallies are Onto Innovation Inc.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed May 20, 2026 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX.

Onto Innovation Inc. — official shareholder meeting results, meeting held May 20, 2026
Ballot item	For	Against	Abstain	Withheld	Broker non-votes	Support (of votes cast)	Reported outcome	Voting standard
Elect Director: Stephen D. Kelley	41,519,539	447,694	54,464	--	2,682,384	99%	Not verified	—
Elect Director: Susan D. Lynch	41,705,037	262,190	54,470	--	2,682,384	99.3%	Not verified	—
Elect Director: David B. Miller	38,775,556	3,185,107	61,034	--	2,682,384	92%	Not verified	—
Elect Director: Michael P. Plisinski	41,724,970	280,583	16,144	--	2,682,384	99.3%	Not verified	—
Elect Director: Stephen S. Schwartz	41,523,952	444,091	53,654	--	2,682,384	99%	Not verified	—
Elect Director: Christopher A. Seams	40,522,014	1,479,450	20,233	--	2,682,384	96%	Not verified	—
Elect Director: May Su	41,056,051	904,119	61,527	--	2,682,384	98%	Not verified	—
2. The compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the 2025 Annual Meeting, by the following vote	40,624,022	1,196,481	201,194	--	2,682,384	97%	Approved	—
3. Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote	44,378,549	178,157	147,375	--	0	99.6%	Approved	—

Source: Onto Innovation Inc., Form 8-K, filed with the SEC on May 20, 2026 — read the filing on EDGAR.

How asset managers voted at the Onto Innovation Inc. 2025-2026 meeting

Each item below shows how the 536 asset managers that disclosed a Onto Innovation Inc. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report.

1. Elect Director: Stephen S. Schwartz

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

99% Majority: yes · of votes cast

FOR 99%

FOR: 41,523,952AGAINST: 444,091

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: Stephen S. Schwartz

Onto Innovation Inc.’s own tally for this item (“Elect Director: Stephen S. Schwartz”): 41,523,952 for, 444,091 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 99% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

The 134 asset managers below reported 20,075,988 for, 1,669 against, 9,761 abstained.

FOR

FOR: 20,075,988AGAINST: 1,669ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: Stephen S. Schwartz” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,204,191	2	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

2. Elect Director: Stephen D. Kelley

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

99% Majority: yes · of votes cast

FOR 99%

FOR: 41,519,539AGAINST: 447,694

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: Stephen D. Kelley

Onto Innovation Inc.’s own tally for this item (“Elect Director: Stephen D. Kelley”): 41,519,539 for, 447,694 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 134 asset managers below reported 20,075,988 for, 1,669 against, 9,761 abstained.

FOR

FOR: 20,075,988AGAINST: 1,669ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: Stephen D. Kelley” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,204,191	2	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

3. Elect Director: Susan D. Lynch

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

99.3% Majority: yes · of votes cast

FOR 99.3%

FOR: 41,705,037AGAINST: 262,190

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: Susan D. Lynch

Onto Innovation Inc.’s own tally for this item (“Elect Director: Susan D. Lynch”): 41,705,037 for, 262,190 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 99.3% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

The 134 asset managers below reported 20,071,719 for, 5,937 against, 9,761 abstained.

FOR

FOR: 20,071,719AGAINST: 5,937ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: Susan D. Lynch” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,200,678	3,514	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

4. Elect Director: David B. Miller

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

92% Majority: yes · of votes cast

FOR 92%

FOR: 38,775,556AGAINST: 3,185,107

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: David B. Miller

Onto Innovation Inc.’s own tally for this item (“Elect Director: David B. Miller”): 38,775,556 for, 3,185,107 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 92% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

The 134 asset managers below reported 19,567,074 for, 510,582 against, 9,761 abstained.

FOR

FOR: 19,567,074AGAINST: 510,582ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: David B. Miller” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,200,669	3,523	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	0	245,787	Against
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

5. Elect Director: Michael P. Plisinski

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

99.3% Majority: yes · of votes cast

FOR 99.3%

FOR: 41,724,970AGAINST: 280,583

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: Michael P. Plisinski

Onto Innovation Inc.’s own tally for this item (“Elect Director: Michael P. Plisinski”): 41,724,970 for, 280,583 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

The 134 asset managers below reported 20,075,990 for, 1,667 against, 9,761 abstained.

FOR

FOR: 20,075,990AGAINST: 1,667ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: Michael P. Plisinski” at Onto Innovation Inc., 2025-2026
Asset manager	For	Vote
Vanguard	5,204,193	For
BlackRock	3,185,049	For
Fidelity	1,889,665	For
Thrivent	729,180	For
T. Rowe Price	718,289	For
Voya	554,069	For
Charles Schwab	526,012	For
Pacer Funds Trust	367,393	For
State Street	367,214	For
Invesco	322,158	For
Prudential/PGIM	321,915	For
FRANKLIN STRATEGIC SERIES	267,342	For
ETF Series Solutions	254,698	For
Royce	247,703	For
Nationwide	247,098	For
FRANKLIN VALUE INVESTORS TRUST	245,787	For
Dimensional	228,512	For
Columbia Threadneedle	222,374	For
JPMorgan	176,933	For
Bridge Builder Trust	172,686	For
Jackson National	169,739	For
First Trust	160,185	For
Goldman Sachs	157,589	For
HARBOR FUNDS	157,357	For
WILLIAM BLAIR FUNDS	153,049	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

6. Elect Director: Christopher A. Seams

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 6 wordings of this item as funds reported it.

96% Majority: yes · of votes cast

FOR 96%

FOR: 40,522,014AGAINST: 1,479,450

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: Christopher A. Seams

Onto Innovation Inc.’s own tally for this item (“Elect Director: Christopher A. Seams”): 40,522,014 for, 1,479,450 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 96% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

The 134 asset managers below reported 20,048,042 for, 29,614 against, 9,761 abstained.

FOR

FOR: 20,048,042AGAINST: 29,614ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: Christopher A. Seams” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,200,674	3,518	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

7. Elect Director: May Su

Outcome not verifiedDIRECTOR ELECTIONSReported outcome: Not verified

Combines 5 wordings of this item as funds reported it.

98% Majority: yes · of votes cast

FOR 98%

FOR: 41,056,051AGAINST: 904,119

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: Election of Directors: May Su

Onto Innovation Inc.’s own tally for this item (“Elect Director: May Su”): 41,056,051 for, 904,119 against, per its Form 8-K filed May 20, 2026 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item.

Reported outcome: not verified — the filing’s own statement of the outcome could not be identified for this item.
Support: 98% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

The 134 asset managers below reported 20,066,841 for, 10,816 against, 9,761 abstained.

FOR

FOR: 20,066,841AGAINST: 10,816ABSTAIN: 9,761

Largest asset managers voting on “Election of Directors: May Su” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,204,191	2	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

8. 2. The compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the…

Official result Fund totals may overlapSECTION 14A SAY-ON-PAY VOTESReported outcome: Approved

Combines 15 wordings of this item as funds reported it.

97% Approved · of votes cast

FOR 97%

FOR: 40,624,022AGAINST: 1,196,481

Details: description as filed, official tally, votes by 536 asset managers

Description as filed by funds: To approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed in the proxy statement; and

Onto Innovation Inc.’s own tally for this item (“2. The compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the 2025 Annual Meeting, by the following vote”): 40,624,022 for, 1,196,481 against — passed, per its Form 8-K filed May 20, 2026 (Item 5.07).

Reported outcome: Approved, in the filing’s own words: “Proposal 2: The stockholders approved, on an advisory (non-binding) basis, the compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the 2025 Annual Meeting, by the following vote:”
Support: 97% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

Fund voting reports and institutional-manager reports both cover this item. An institutional manager can report shares that a fund it advises also reports, so the two are shown separately below and never added together, and their sum is not shown (fund and manager reports combined may count the same shares twice).

Fund voting reports: 134 asset managers voting on “To approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed ” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,204,189	3	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,214	0	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Fund voting reports, all 134 managers: 19,974,482 for, 118,048 against, 9,761 abstained. Showing the 25 largest; see all in the interactive database.

Institutional-manager reports: 435 asset managers voting on “To approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed ” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
BlackRock	2,095,662	358	For
State Street	1,387,247	0	For
Point72	1,369,236	0	For
GEODE CAPITAL MANAGEMENT, LLC	1,197,595	0	For
T. Rowe Price	1,129,356	0	For
PARADIGM CAPITAL MANAGEMENT INC/NY	1,035,621	0	For
WILLIAM BLAIR INVESTMENT MANAGEMENT, LLC	901,173	0	For
Voya	880,218	0	For
Fidelity	871,511	0	For
Thrivent	739,330	0	For
GENEVA CAPITAL MANAGEMENT LLC	683,870	0	For
Invesco	652,753	0	For
JENNISON ASSOCIATES LLC	554,390	0	For
Charles Schwab	527,605	0	For
WESTFIELD CAPITAL MANAGEMENT CO LP	439,081	0	For
Northern Trust	414,508	0	For
Fisher Asset Management, LLC	395,409	0	For
Vanguard	390,033	0	For
FRANKLIN ADVISERS INC	362,086	0	For
AQR	351,548	0	For
MELLON INVESTMENTS Corp	335,600	0	For
Wellington	322,268	0	For
Allspring	308,296	0	For
FRANKLIN MUTUAL ADVISERS LLC	300,082	0	For
Bridgewater	264,968	0	For

Institutional-manager reports, all 435 managers: 26,960,431 for, 791,801 against, 120,954 abstained, 9,460 not voted. Showing the 25 largest; see all in the interactive database.

9. 3. Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December…

Official resultAUDIT-RELATEDReported outcome: Approved

Combines 4 wordings of this item as funds reported it.

99.6% Approved · of votes cast

FOR 99.6%

FOR: 44,378,549AGAINST: 178,157

Details: description as filed, official tally, votes by 134 asset managers

Description as filed by funds: To ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fiscal year ending December 31, 2026.

Onto Innovation Inc.’s own tally for this item (“3. Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote”): 44,378,549 for, 178,157 against — passed, per its Form 8-K filed May 20, 2026 (Item 5.07).

Reported outcome: Approved, in the filing’s own words: “Proposal 3: The stockholders ratified Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote:”
Support: 99.6% of votes cast — FOR ÷ (FOR + AGAINST); abstentions and broker non-votes are excluded.

Also reported under other wordings, matched to the same row of Onto Innovation Inc.’s official tally and shown with their own fund figures; their managers are not in the figures or the table on this card: “Ratify Appointment of Independent Auditors” (2 managers, 20,585 for).

The 134 asset managers below reported 20,060,136 for, 21 against, 9,761 abstained.

FOR

FOR: 20,060,136AGAINST: 21ABSTAIN: 9,761

Largest asset managers voting on “To ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fi” at Onto Innovation Inc., 2025-2026
Asset manager	For	Against	Vote
Vanguard	5,204,193	0	For
BlackRock	3,185,049	0	For
Fidelity	1,889,665	0	For
Thrivent	729,180	0	For
T. Rowe Price	718,289	0	For
Voya	554,069	0	For
Charles Schwab	526,012	0	For
Pacer Funds Trust	367,393	0	For
State Street	367,193	21	For
Invesco	322,158	0	For
Prudential/PGIM	321,915	0	For
FRANKLIN STRATEGIC SERIES	267,342	0	For
ETF Series Solutions	254,698	0	For
Royce	247,703	0	For
Nationwide	247,098	0	For
FRANKLIN VALUE INVESTORS TRUST	245,787	0	For
Dimensional	228,512	0	For
Columbia Threadneedle	222,374	0	For
JPMorgan	176,933	0	For
Bridge Builder Trust	172,686	0	For
Jackson National	169,739	0	For
First Trust	160,185	0	For
Goldman Sachs	157,589	0	For
HARBOR FUNDS	157,357	0	For
WILLIAM BLAIR FUNDS	153,049	0	For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

Largest Onto Innovation Inc. shareholders voting in 2025-2026

Ranked separately for each type of Form N-PX report. An institutional manager can report shares that a fund it advises also reports, so the two tables can list the same shares and are never added together. Each is ranked by the shares voted on the item that the most managers of that type reported, shown as a share of the 49,744,000 shares outstanding at the time of that meeting.

Fund voting reports: top Onto Innovation Inc. shareholders by shares voted on “To approve, on an advisory (non-binding) basis, the compensation of our named executive…”, 2025-2026
#	Asset manager	% of shares outstanding
1	Vanguard	10.46%
2	BlackRock	6.40%
3	Fidelity	3.80%
4	Thrivent	1.47%
5	T. Rowe Price	1.44%
6	Voya	1.11%
7	Charles Schwab	1.06%
8	Pacer Funds Trust	0.74%
9	State Street	0.74%
10	Invesco	0.65%

Institutional-manager reports: top Onto Innovation Inc. shareholders by shares voted on “To approve, on an advisory (non-binding) basis, the compensation of our named executive…”, 2025-2026
#	Asset manager	% of shares outstanding
1	BlackRock	4.21%
2	State Street	2.79%
3	Point72	2.75%
4	GEODE CAPITAL MANAGEMENT, LLC	2.41%
5	T. Rowe Price	2.27%
6	PARADIGM CAPITAL MANAGEMENT INC/NY	2.08%
7	WILLIAM BLAIR INVESTMENT MANAGEMENT, LLC	1.81%
8	Voya	1.77%
9	Fidelity	1.75%
10	Thrivent	1.49%

Reported Onto Innovation Inc. holdings and ownership

As disclosed to the SEC in Form 13F (quarter-end holdings of 30 large managers), Schedules 13D and 13G (beneficial ownership above 5%) and the company’s own proxy statement (DEF 14A). Each row names its form.

Onto Innovation Inc. holdings and ownership disclosed for the 2025-2026 proxy season
Holder	% outstanding	Disclosure
Vanguard Group	11.21%	13F
BlackRock	11.13%	13F
Vanguard Portfolio Management	5.53%	13G
State Street	3.01%	13F
Point72	2.42%	13F
FMR (Fidelity)	1.67%	13F
D.E. Shaw	1.45%	13F
Dimensional Fund Advisors	1.36%	13F
Invesco	1.27%	13F
T. Rowe Price	1.22%	13F

Percentages above are of 49,744,000 shares outstanding, as reported by Onto Innovation Inc. on its Form 10-Q dated March 31, 2026 (see the filing on EDGAR). This is the count contemporaneous with the 2025-2026 meeting, not today’s. Each holding is as of its own filing, which may be dated before or after the meeting.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered funds disclose how they voted every proxy and institutional managers disclose their votes on executive pay (say-on-pay, say-on-frequency and golden parachutes), and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from Onto Innovation Inc.’s 10-Q dated March 31, 2026. This page is a static snapshot rebuilt weekly on October 18, 2026; a live search always shows the current data.

At Onto Innovation Inc.'s shareholder meeting held May 20, 2026, in the 2025-2026 proxy season, 536 asset managers reported how they voted on 9 ballot items in their SEC Form N-PX filings, covering 6,080 separate fund positions. On the most widely held item on that ballot — To approve, on an advisory (non-binding) basis, the compensation of our named executive… — Onto Innovation Inc.'s filing reports the proposal as approved, with 97% support of the votes cast (FOR divided by FOR plus AGAINST, the conventional basis for proxy support; abstentions, broker non-votes and unvoted shares are excluded because none of them took a side). Source: Onto Innovation Inc.'s Form 8-K, Item 5.07, filed with the U.S. Securities and Exchange Commission on May 20, 2026.

Onto Innovation Inc. proxy season coverage: 2023-2024 · 2024-2025 · 2025-2026 (this page).

Download data (CSV): ballot items · votes by manager · column guide.